Aluminum deposition can be accomplished using several different methods, each with its own advantages and disadvantages, including varying deposition rates. Here’s a comparison of common deposition methods for aluminum:
### 1. **Physical Vapor Deposition (PVD)**
- **Techniques**: Includes sputtering and thermal evaporation.
- **Deposition Rate**:
- Sputtering: Generally lower deposition rates, on the order of a few nm/min to


